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Proceedings Paper

Laser-assisted nanoprocessing and growth of semiconductor nanostructures
Author(s): David J. Hwang; Sang-Gil Ryu; Eunpa Kim; Jae-Hyuck Yoo; Bin Xiang; Oscar Dubon; Andrew M. Minor; Costas P. Grigoropoulos
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Paper Abstract

Recent research results are presented where lasers of different pulse durations and wavelengths have been coupled to near-field-scanning optical microscopes (NSOMs) through apertured bent cantilever fiber probes and atomic force microscope (AFM) tips in apertureless configurations. Experiments have been conducted on the surface modification of metals and semiconductor materials. By combining nanoscale ablative material removal with subsequent chemical etching steps, ablation nanolithography and patterning of fused silica and crystalline silicon wafers has been demonstrated. Confinement of laser-induced crystallization to nanometric scales has also been shown. In-situ observation of the nanoscale materials modification was conducted by coupling the NSOM tips with a scanning electron microscope (SEM). Nucleation and growth of semiconductor materials have been achieved by laser chemical vapor deposition (LCVD) at the nanoscale level. Locally selective growth of crystalline silicon nanowires with controlled size, heterogeneity and nanometric placement accuracy has been accomplished.

Paper Details

Date Published: 13 May 2011
PDF: 9 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803106 (13 May 2011); doi: 10.1117/12.882809
Show Author Affiliations
David J. Hwang, Univ. of California, Berkeley (United States)
Sang-Gil Ryu, Univ. of California, Berkeley (United States)
Eunpa Kim, Univ. of California, Berkeley (United States)
Jae-Hyuck Yoo, Univ. of California, Berkeley (United States)
Bin Xiang, Univ. of California, Berkeley (United States)
Lawrence Berkeley National Lab. (United States)
Oscar Dubon, Univ. of California, Berkeley (United States)
Lawrence Berkeley National Lab. (United States)
Andrew M. Minor, Univ. of California, Berkeley (United States)
Lawrence Berkeley National Lab. (United States)
Costas P. Grigoropoulos, Univ. of California, Berkeley (United States)


Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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