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Proceedings Paper

Finite element modelling and simulation of thermo-elastical damping of MEMS vibrations
Author(s): Saulius Kausinis; Karl Yee; Rimantas Barauskas
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Paper Abstract

The contribution is directed to providing accurate simulation and approximation of the Q-factor determined by thermalelastic damping in complex micro-electromechanical (MEM) resonators. The base model created is presented as a system of partial differential equations, which describe the elastic and thermal phenomena in the MEM structure. The FEM calculations were performed by using COMSOL Multiphysics software. The model was verified by comparing numerically and analytically obtained damped modal properties of a MEM cantilever resonator. The comparison of calculated and experimentally obtained resonant frequencies and Q-factor values indicated a good agreement of tendencies of change of the quantities against temperature. Investigation of longitudinal and bending vibration modes in 3D of a beam resonators was accomplished by taking into account the layered structure of the resonator and the influence of the geometry of the clamping zone. Modal properties of rectangle- and ring-shaped bulk-mode MEM resonators were examined, too.

Paper Details

Date Published: 13 May 2011
PDF: 7 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311B (13 May 2011); doi: 10.1117/12.882784
Show Author Affiliations
Saulius Kausinis, Kaunas Univ. of Technology (Lithuania)
Karl Yee, Jet Propulsion Lab. (United States)
Rimantas Barauskas, Kaunas Univ. of Technology (Lithuania)


Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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