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Proceedings Paper

Implementing a capacitive pressure sensor realized on LTCC
Author(s): Cosmin Tămaş; Cristina Marghescu; Ciprian Ionescu; Alexandru Vasile
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Paper Abstract

LTCC (Low Temperature Co-Fired Ceramic) has great potential in the field of sensors and transducers due to its thermal, electrical and mechanical properties. The paper describes work concerning a capacitive pressure sensor realized on LTCC with thick-film deposition technologies. A capacitive pressure sensor converts a change in the position of the conductive plates to an electrical signal; for this a deformable diaphragm is used. In the presented case one electrode is bonded to the deformable diaphragm (an edge-clamped, circular diaphragm) and the other electrode is fixed. The signal from the sensor is processed by the AD7745 circuit. This circuit is a high resolution digital capacity-signal converter with high performances, high linearity ±0.01% and very good accuracy ±4 fF. The circuit also encompasses a voltage reference and a temperature sensor with a resolution of 0.1°C. The external connection is made through the I2C interface, using a signal control unit which processes the signal and sends the information to an LCD (liquid crystal display) and/or to a computer which, in turn, records the information for later use through the USB interface.

Paper Details

Date Published: 3 December 2010
PDF: 6 pages
Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78210H (3 December 2010); doi: 10.1117/12.882397
Show Author Affiliations
Cosmin Tămaş, Politehnica Univ. of Bucharest (Romania)
Cristina Marghescu, Politehnica Univ. of Bucharest (Romania)
Ciprian Ionescu, Politehnica Univ. of Bucharest (Romania)
Alexandru Vasile, Politehnica Univ. of Bucharest (Romania)

Published in SPIE Proceedings Vol. 7821:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V
Paul Schiopu; George Caruntu, Editor(s)

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