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Proceedings Paper

Optical spectra of two-dimensional photonic crystal bars based on macroporous Si
Author(s): Sergey A. Dyakov; Ekaterina V. Astrova; Tatiana S. Perova; Vladimir A. Tolmachev; Galina V. Fedulova; Anna Baldycheva; Viktor Yu. Timoshenko; Sergei G. Tikhodeev; Nikolay A. Gippius
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Paper Abstract

Two-dimensional (2D) photonic crystal (PC) bars with 6 and 21 periods were fabricated by simultaneous photoelectrochemical etching of macropores and trenches in a pre-patterned silicon wafer. The structures had square lattice of cylindrical pores and were terminated by nonmodulated silicon pre-layers. The infrared reflection spectra of the PC bars have been simulated using scattering matrix method. In order to take into account the roughness of pore inner surface an additional silicon layer around the pores was introduced with a fitted complex refractive index. A comparison between the simulated refection spectra and those obtained experimentally demonstrates a satisfactory agreement in the region of secondary photonic band gaps.

Paper Details

Date Published: 17 January 2011
PDF: 9 pages
Proc. SPIE 7943, Silicon Photonics VI, 79431I (17 January 2011); doi: 10.1117/12.882369
Show Author Affiliations
Sergey A. Dyakov, Trinity College Dublin (Ireland)
Lomonosov Moscow State Univ. (Russian Federation)
Ekaterina V. Astrova, Ioffe Physico-Technical Institute (Russian Federation)
Tatiana S. Perova, Trinity College Dublin (Ireland)
Vladimir A. Tolmachev, Ioffe Physico-Technical Institute (Russian Federation)
Galina V. Fedulova, Ioffe Physico-Technical Institute (Russian Federation)
Anna Baldycheva, Trinity College Dublin (Ireland)
Viktor Yu. Timoshenko, Lomonosov Moscow State Univ. (Russian Federation)
Sergei G. Tikhodeev, A. M. Prokhorov General Physics Institute (Russian Federation)
Nikolay A. Gippius, A. M. Prokhorov General Physics Institute (Russian Federation)

Published in SPIE Proceedings Vol. 7943:
Silicon Photonics VI
Joel A. Kubby; Graham T. Reed, Editor(s)

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