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Proceedings Paper

Aerial image retargeting (AIR): achieving litho-friendly designs
Author(s): Ayman Yehia Hamouda; James Word; Mohab Anis; Karim S. Karim
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Paper Abstract

In this work, we present a new technique to detect non-Litho-Friendly design areas based on their Aerial Image signature. The aerial image is calculated for the litho target (pre-OPC). This is followed by the fixing (retargeting) the design to achieve a litho friendly OPC target. This technique is applied and tested on 28 nm metal layer and shows a big improvement in the process window performance. For an optimized Aerial-Image-Retargeting (AIR) recipe is very computationally efficient and its runtime doesn't consume more than 1% of the OPC flow runtime.

Paper Details

Date Published: 4 April 2011
PDF: 8 pages
Proc. SPIE 7974, Design for Manufacturability through Design-Process Integration V, 797411 (4 April 2011); doi: 10.1117/12.882073
Show Author Affiliations
Ayman Yehia Hamouda, Mentor Graphics Corp. (United States)
Univ. of Waterloo (Canada)
James Word, Mentor Graphics Corp. (United States)
Mohab Anis, The American Univ. in Cairo (Egypt)
Karim S. Karim, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 7974:
Design for Manufacturability through Design-Process Integration V
Michael L. Rieger, Editor(s)

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