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Proceedings Paper

On electrostatically actuated NEMS/MEMS circular plates
Author(s): Dumitru I. Caruntu; Iris Alvarado
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Paper Abstract

This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

Paper Details

Date Published: 13 April 2011
PDF: 10 pages
Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79810Z (13 April 2011); doi: 10.1117/12.882033
Show Author Affiliations
Dumitru I. Caruntu, The Univ. of Texas-Pan American (United States)
Iris Alvarado, The Univ. of Texas-Pan American (United States)


Published in SPIE Proceedings Vol. 7981:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
Masayoshi Tomizuka, Editor(s)

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