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Proceedings Paper

Bridge type and cantilever type MEMS switch structures
Author(s): D. Vasilache; G. Boldeiu; V. Moagar; Catalin Tibeica
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Paper Abstract

The aim of this paper is to present two different types of MEMS switch structures developed in IMT: bridge and cantilever. For these two configurations were chosen different length of bridges and cantilevers; also, for the actuation pads used were considered different size. Finite Element Method simulations were performed in order to determine the pull-in voltage. Comparison between simulated and measured results will be presented for the bridge type switch structure.

Paper Details

Date Published: 3 December 2010
PDF: 6 pages
Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78210N (3 December 2010); doi: 10.1117/12.881776
Show Author Affiliations
D. Vasilache, Fondazione Bruno Kessler (Italy)
IMT-Bucharest (Romania)
G. Boldeiu, IMT-Bucharest (Romania)
V. Moagar, IMT-Bucharest (Romania)
Catalin Tibeica, National Institute for Research and Development in Microtechnologies-IMT Bucharest (Romania)

Published in SPIE Proceedings Vol. 7821:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V
Paul Schiopu; George Caruntu, Editor(s)

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