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Proceedings Paper

Scatterometry simulator using GPU and evolutionary algorithm
Author(s): Hirokimi Shirasaki
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Paper Abstract

In this paper, we show scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit). Here, we use the programming language CUDA (Compute Unified Device Architecture) and CULA (CULApack) for the NVIDIA GPU. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. An evolutionary algorithm (EA) and a conjugate gradient (CG) method are used as the technique to automatically search the data which resembles the given spectrum. Then, the results using this simulator are provided.

Paper Details

Date Published: 20 April 2011
PDF: 7 pages
Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711T (20 April 2011); doi: 10.1117/12.881505
Show Author Affiliations
Hirokimi Shirasaki, Tamagawa Univ. (Japan)

Published in SPIE Proceedings Vol. 7971:
Metrology, Inspection, and Process Control for Microlithography XXV
Christopher J. Raymond, Editor(s)

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