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Proceedings Paper

3D features measurement using YieldStar, an angle resolved polarized scatterometer
Author(s): Anne-Laure Charley; Philippe Leray; Koen D'havé; Shaunee Cheng; Paul Hinnen; Fahong Li; Peter Vanoppen; Mircea Dusa
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Paper Abstract

Metrology on 3D features like contact holes (CH) is more challenging than on lines and spaces (L/S) structures especially if one wants to have profile information. Scatterometry has been widely used on L/S structures and has enabled characterization of lithographic features providing with critical dimensions (CD) as well as feature height and side wall angle. In this paper, we will present the application of scatterometry to the measurement of 3D structures using an angle resolved polarized scatterometer: ASML YieldStar S-100. Contact hole measurements will be presented and correlation to standard metrology tools will be shown. Measurement capability will be discussed in terms of reproducibility, calculation time, sensitivity of the parameters of interest and correlation between them leading to a proper model choice. Finally initial results on more complex 3D features (line ends, brick walls,...) will be presented.

Paper Details

Date Published: 20 April 2011
PDF: 7 pages
Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79712E (20 April 2011); doi: 10.1117/12.881276
Show Author Affiliations
Anne-Laure Charley, IMEC (Belgium)
Philippe Leray, IMEC (Belgium)
Koen D'havé, IMEC (Belgium)
Shaunee Cheng, IMEC (Belgium)
Paul Hinnen, ASML Netherlands B.V. (Netherlands)
Fahong Li, ASML Netherlands B.V. (Netherlands)
Peter Vanoppen, ASML Netherlands B.V. (Netherlands)
Mircea Dusa, ASML Netherlands B.V. (Netherlands)

Published in SPIE Proceedings Vol. 7971:
Metrology, Inspection, and Process Control for Microlithography XXV
Christopher J. Raymond, Editor(s)

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