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Proceedings Paper

Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm
Author(s): Yun-ho Shin; Dong-doo Jang; Seok-jun Moon; Hyung-Jo Jung; Yeong-jong Moon; Chang-kyu Song
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Paper Abstract

Recently, vibration requirements are getting stricter as precise equipments need more improved vibration environment to realize their powerful performance. Though the passive pneumatic vibration isolation tables are frequently used to satisfy the rigorous vibration requirements, the specific vibration problem, especially continuous sinusoidal or periodic vibration induced by a rotor system of other precise equipment, a thermo-hygrostat or a ventilation system, is still left. In this research, the application procedure of Filtered-X LMS algorithm to pneumatic vibration isolation table with piezo-stack actuators is proposed to enhance the isolation performance for the continuous sinusoidal or periodic vibration. In addition, the experimental results to show the isolation performance of proposed system are also presented together with the isolation performance of passive pneumatic isolation table.

Paper Details

Date Published: 15 April 2011
PDF: 9 pages
Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79813H (15 April 2011); doi: 10.1117/12.881203
Show Author Affiliations
Yun-ho Shin, Korea Institute of Machinery & Materials (Korea, Republic of)
Dong-doo Jang, KAIST (Korea, Republic of)
Seok-jun Moon, Korea Institute of Machinery & Materials (Korea, Republic of)
Hyung-Jo Jung, KAIST (Korea, Republic of)
Yeong-jong Moon, Samsung Electronics Co., Ltd. (Korea, Republic of)
Chang-kyu Song, Korea Institute of Machinery & Materials (Korea, Republic of)


Published in SPIE Proceedings Vol. 7981:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
Masayoshi Tomizuka, Editor(s)

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