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Proceedings Paper

A lossless circuit layout image compression algorithm for electron beam direct write lithography systems
Author(s): Jeehong Yang; Serap A. Savari
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Paper Abstract

The recent algorithm Corner is a transform-based technique to represent a circuit layout image for electron beam direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1) it requires fewer symbols during the corner transform, 2) it has a simpler and faster decoding process, and 3) it requires a similar amount of memory for the decoding process.

Paper Details

Date Published: 4 April 2011
PDF: 12 pages
Proc. SPIE 7970, Alternative Lithographic Technologies III, 79701U (4 April 2011); doi: 10.1117/12.881192
Show Author Affiliations
Jeehong Yang, Univ. of Michigan (United States)
Serap A. Savari, Texas A&M Univ. (United States)


Published in SPIE Proceedings Vol. 7970:
Alternative Lithographic Technologies III
Daniel J. C. Herr, Editor(s)

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