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Proceedings Paper

Laser surface structuring with long depth of focus
Author(s): Andreas Michalowski; Christian Freitag; Rudolf Weber; Thomas Graf
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Paper Abstract

Theoretical and experimental results concerning the use of axicons for laser-ablation are reported. Analytical formulas allow to predict the generated fluence distributions and the expected ablation widths. The influence of an imperfect axicon tip is discussed. The long depth of focus of the generated beam enables easy small-sized laser marking in dimension of the laser wavelength.

Paper Details

Date Published: 21 February 2011
PDF: 7 pages
Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200W (21 February 2011); doi: 10.1117/12.881189
Show Author Affiliations
Andreas Michalowski, Univ. Stuttgart (Germany)
Christian Freitag, Univ. Stuttgart (Germany)
Rudolf Weber, Univ. Stuttgart (Germany)
Thomas Graf, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 7920:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
Bo Gu; Guido Hennig; Xianfan Xu; Hiroyuki Niino, Editor(s)

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