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Proceedings Paper

Fiberoptic microphone using a polymeric cavity
Author(s): Wei-Chih Wang; William Soetanto; Kebin Gu
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Paper Abstract

The fabrication and experimental investigation of a fiberoptic microphone is described. The sensing element is a silicon diaphragm with gold thin film coating that is positioned inside a silicone rubber mold at the end of a single mode optical fiber. Thus, a Fabry-Perot interferometer is formed between the inner fiber and the diaphragm. An acoustic pressure change is detected by using the developed microphone. The polymeric cavity and silicon diaphragm-based system exhibits excellent physicochemical properties with a small, simple, low cost, and lightweight design. The system is also electromagnetic interference / radio frequency interference immunity due to the use of fiberoptics.

Paper Details

Date Published: 31 March 2011
PDF: 9 pages
Proc. SPIE 7984, Health Monitoring of Structural and Biological Systems 2011, 79842B (31 March 2011); doi: 10.1117/12.880694
Show Author Affiliations
Wei-Chih Wang, Univ. of Washington (United States)
William Soetanto, Univ. of Washington (United States)
Kebin Gu, Univ. of Washington (United States)

Published in SPIE Proceedings Vol. 7984:
Health Monitoring of Structural and Biological Systems 2011
Tribikram Kundu, Editor(s)

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