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Proceedings Paper

An optical biosensor using MEMS-based V-grooves
Author(s): Ye Tian; Xiaodong Ma; Xiaotian Zou; Nan Wu; Xingwei Wang
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Paper Abstract

An optical fiber biosensor featuring miniaturization, electromagnetic interference (EMI)-immunity, and flexibility is presented. The sensor was fabricated by aligning two gold-deposited optical single-mode fiber facets inside V-grooves on a silicon chip to form a Fabry-Perot (FP) cavity. The mirrors on the fiber facets were made of deposited gold (Au) films, which provided a high finesse to produce a highly sensitivity. Microelectromechanical systems (MEMS) fabrication techniques were used to precisely control the profile and angle of the V-grooves on the silicon. The biotin-terminated thiol molecule was firstly immobilized on the gold surface. Subsequently, the molecules of Neutravidin were specifically bound to the biotin-terminated self-assembled monolayers (SAMs). The induced changes of cavity length and refractive index (RI) upon the gold surface lead to an optical path difference (OPD) of the FP cavity, which was detected by demodulating the transmission spectrum phase shift. By taking advantage of MEMS techniques, multiple biosensors can be integrated into one small silicon chip for detecting various biomolecule targets simultaneously.

Paper Details

Date Published: 26 May 2011
PDF: 7 pages
Proc. SPIE 8024, Advanced Environmental, Chemical, and Biological Sensing Technologies VIII, 802403 (26 May 2011); doi: 10.1117/12.880585
Show Author Affiliations
Ye Tian, Univ. of Massachusetts Lowell (United States)
Xiaodong Ma, Univ. of Massachusetts Lowell (United States)
Xiaotian Zou, Univ. of Massachusetts Lowell (United States)
Nan Wu, Univ. of Massachusetts Lowell (United States)
Xingwei Wang, Univ. of Massachusetts Lowell (United States)


Published in SPIE Proceedings Vol. 8024:
Advanced Environmental, Chemical, and Biological Sensing Technologies VIII
Tuan Vo-Dinh; Robert A. Lieberman; Günter Gauglitz, Editor(s)

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