Share Email Print
cover

Proceedings Paper

Investigation on accuracy of process overlay measurement
Author(s): Chan Hwang; Jeongjin Lee; Seungyoon Lee; Jeongho Yeo; Yeonghee Kim; Hongmeng Lim; Dongsub Choi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The shrinkage of design rule necessitated corresponding tighter overlay control. However, in advanced applications, the extension of current technology may not be able to meet the control requirement, consequently, additional breakthroughs are required. In this study, we investigated methods to enhance the overlay control, approaches by extraction of real overlay error out of overlay measurement. So far, only the destructive inspections like vertical SEM have enabled us to measure real misalignment. But, a concept of non-destructive method is proposed in this paper, extracting vertical information from the results of multiple measurements with various measurement conditions, keys or recipes. With this proposed method, the measurement accuracy can be improved and we can enable a new knob for overlay control.

Paper Details

Date Published: 20 April 2011
PDF: 7 pages
Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711F (20 April 2011); doi: 10.1117/12.880299
Show Author Affiliations
Chan Hwang, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Jeongjin Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Seungyoon Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Jeongho Yeo, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Yeonghee Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Hongmeng Lim, KLA-Tencor Singapore (Singapore)
Dongsub Choi, KLA-Tencor Korea (Korea, Republic of)


Published in SPIE Proceedings Vol. 7971:
Metrology, Inspection, and Process Control for Microlithography XXV
Christopher J. Raymond, Editor(s)

© SPIE. Terms of Use
Back to Top