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Proceedings Paper

Integrating single-point vibrometer and full-field electronic speckle pattern interferometer to evaluate a micro-speaker
Author(s): Wen-Chi Chang; Yu-Chi Chen; Chih-Jen Chien; An-Bang Wang; Chih-Kung Lee
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Paper Abstract

A testing system contains an advanced vibrometer/interferometer device (AVID) and a high-speed electronic speckle pattern interferometer (ESPI) was developed. AVID is a laser Doppler vibrometer that can be used to detect single-point linear and angular velocity with DC to 20 MHz bandwidth and with nanometer resolution. In swept frequency mode, frequency response from mHz to MHz of the structure of interest can be measured. The ESPI experimental setup can be used to measure full-field out-of-plane displacement. A 5-1 phase shifting method and a correlation algorithm were used to analyze the phase difference between the reference signal and the speckle signal scattered from the sample surface. In order to show the efficiency and effectiveness of AVID and ESPI, we designed a micro-speaker composed of a plate with fixed boundaries and two piezo-actuators attached to the sides of the plate. The AVID was used to measure the vibration of one of the piezo-actuators and the ESPI was adopted to measure the two-dimensional out-of-plane displacement of the plate. A microphone was used to measure the acoustic response created by the micro-speaker. Driving signal includes random signal, sinusoidal signal, amplitude modulated high-frequency carrier signal, etc. Angular response induced by amplitude modulated high-frequency carrier signal was found to be significantly narrower than the frequency responses created by other types of driving signals. The validity of our newly developed NDE system are detailed by comparing the relationship between the vibration signal of the micro-speaker and the acoustic field generated.

Paper Details

Date Published: 18 April 2011
PDF: 10 pages
Proc. SPIE 7983, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2011, 79831D (18 April 2011); doi: 10.1117/12.880275
Show Author Affiliations
Wen-Chi Chang, National Taiwan Univ. (Taiwan)
Yu-Chi Chen, National Taiwan Univ. (Taiwan)
Chih-Jen Chien, National Taiwan Univ. (Taiwan)
An-Bang Wang, National Taiwan Univ. (Taiwan)
Chih-Kung Lee, National Taiwan Univ. (Taiwan)
Institute for Information Industry (Taiwan)

Published in SPIE Proceedings Vol. 7983:
Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2011
H. Felix Wu, Editor(s)

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