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Proceedings Paper

Artifacts of the AFM image due to the probe controlling parameters
Author(s): Hiroshi Itoh; Chunmei Wang; Hideki Takagi
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Paper Abstract

Image of the atomic force microscopy (AFM) is the convolution of probe shape and specimen geometry. However, probe shape for AFM imaging is not equivalent to the actual probe shape. Gap distance was controlled with the interaction between probe and specimen. Imaging parameters for controlling gap distance between probe and specimen surface is one of the origins of image artifacts. Artifacts of the AFM image were analyzed as a function of set-point in dynamic mode, using well defined reference specimen. Two kinds of typical objects, such as single protrusion and narrow gap were used for the analysis of artifacts in the AFM image.

Paper Details

Date Published: 20 April 2011
PDF: 6 pages
Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711A (20 April 2011); doi: 10.1117/12.879774
Show Author Affiliations
Hiroshi Itoh, National Institute of Advanced Industrial Science and Technology (Japan)
Chunmei Wang, National Institute of Advanced Industrial Science and Technology (Japan)
Hideki Takagi, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 7971:
Metrology, Inspection, and Process Control for Microlithography XXV
Christopher J. Raymond, Editor(s)

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