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Proceedings Paper

Processing of metals with ps-laser pulses in the range between 10ps and 100ps
Author(s): Marc Schmid; Beat Neuenschwander; Valerio Romano; Beat Jaeggi; Urs W. Hunziker
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Paper Abstract

The potential of pulsed laser system in the range of 10ps to 100ps pulse duration for material processing has been further investigated. In detail the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration and number of pulses applied to the material will be discussed. The experimental results show that in the case of copper and steel, better results in quality and efficiency of the ablated material are achieved with shorter pulse durations.

Paper Details

Date Published: 21 February 2011
PDF: 7 pages
Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 792009 (21 February 2011); doi: 10.1117/12.879498
Show Author Affiliations
Marc Schmid, Berner Fachhochschule Technik und Informatik (Switzerland)
Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)
Valerio Romano, Berner Fachhochschule Technik und Informatik (Switzerland)
Beat Jaeggi, Berner Fachhochschule Technik und Informatik (Switzerland)
Urs W. Hunziker, Berner Fachhochschule Technik und Informatik (Switzerland)


Published in SPIE Proceedings Vol. 7920:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
Bo Gu; Guido Hennig; Xianfan Xu; Hiroyuki Niino, Editor(s)

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