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Setup and performance of a new high-viscosity dispense system
Author(s): Jennifer Braggin; Nelson Vitorino; Stephen Meyer
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Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, ; doi: 10.1117/12.879459
Show Author Affiliations
Jennifer Braggin, Entegris, Inc. (United States)
Nelson Vitorino, AZ Electronic Materials USA Corp. (United States)
Stephen Meyer, AZ Electronic Materials USA Corp. (United States)


Published in SPIE Proceedings Vol. 7972:
Advances in Resist Materials and Processing Technology XXVIII
Robert D. Allen; Mark H. Somervell, Editor(s)

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