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Proceedings Paper

Synthesis and photo-initiated polymerization of silicon-containing hybrid monomers
Author(s): Yuan Fang; Yingquan Zou
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Paper Abstract

A series of silicon-containing hybrid monomers which contained both vinyl ether group and allyl ether group had been synthesized. The monomers' photo-polymerization kinetics was investigated with RTIR. Results showed that the hybrid monomers could photo-polymerize effectively and both free radical and cationic polymerization processes were improved. When PAG201 (a kind of cationic photo-initiator) was introduced into the monomers, the conversion of vinyl ether double bond increased sharply. The final conversion was close to 100%, and at the 6 sec, the polymerization achieved maximum. At the same time, the allyl ether double bond left. When 2-Isopropylthioxanthone (ITX, a kind of free radical photo-initiator) was introduced into hybrid system containing PAG201, the final conversion of allyl ether double bond and polymerization rate (Rp) increased obviously. It was demonstrated that the hybrid silicon-containing monomers polymerized rapidly and completely with both of the free radical and cationic photo-initiators. The property showed that the five monomers can be used in nanoimprint resist system or UV imaging materials.

Paper Details

Date Published: 15 April 2011
PDF: 7 pages
Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79722B (15 April 2011); doi: 10.1117/12.879295
Show Author Affiliations
Yuan Fang, Beijing Normal Univ. (China)
Yingquan Zou, Beijing Normal Univ. (China)


Published in SPIE Proceedings Vol. 7972:
Advances in Resist Materials and Processing Technology XXVIII
Robert D. Allen; Mark H. Somervell, Editor(s)

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