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Proceedings Paper

Illuminator predictor for effective SMO solutions
Author(s): Daniel G. Smith; Naonori Kita; Nobumichi Kanayamaya; Ryota Matsui; Shane R. Palmer; Tomoyuki Matsuyama; Donis G. Flagello
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Paper Abstract

Source Mask Optimization (SMO) is one of the most important techniques available for extending ArF immersion lithography1. However, imaging with a small k12 factor (~0.3 or smaller) is very sensitive to errors in the illumination pupil2. As a result, care must be taken to insure that the source solution from SMO can be produced by the real illuminator, which is subject to its own imaging constraints. One approach is to include an illuminator simulator in the SMO loop so that only realizable illumination pupils are considered during optimization. Furthermore, any illumination pupil predictor used in SMO should operate quickly compared to the imaging simulation if it is to avoid increasing the computational load.

Paper Details

Date Published: 22 March 2011
PDF: 9 pages
Proc. SPIE 7973, Optical Microlithography XXIV, 797309 (22 March 2011); doi: 10.1117/12.879116
Show Author Affiliations
Daniel G. Smith, Nikon Research Corp. of America (United States)
Naonori Kita, Nikon Corp. (Japan)
Nobumichi Kanayamaya, Nikon Corp. (Japan)
Ryota Matsui, Nikon Corp. (Japan)
Shane R. Palmer, Nikon Research Corp. of America (United States)
Tomoyuki Matsuyama, Nikon Corp. (Japan)
Donis G. Flagello, Nikon Research Corp. of America (United States)

Published in SPIE Proceedings Vol. 7973:
Optical Microlithography XXIV
Mircea V. Dusa, Editor(s)

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