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Proceedings Paper

Fabrication, substructure and properties of LiNbO[sub]3[/sub] films
Author(s): V. Iyevlev; A. Kostyuchenko; M. Sumets
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Paper Abstract

By the method of magnetron sputtering the nanocrystalline films LiNbO3 on the surfaces of (001)Si, (111)Si and of Si- SiO2 heterostructure have been synthesized. The elemental and phase composition, structure and surface morphology, the electrical-physical parameters of the heterostructures (001)Si-LiNbO3 and (111)Si-SiO2-LiNbO3 have been studied.

Paper Details

Date Published: 17 January 2011
PDF: 8 pages
Proc. SPIE 7747, 16th International School on Quantum Electronics: Laser Physics and Applications, 77471J (17 January 2011); doi: 10.1117/12.879075
Show Author Affiliations
V. Iyevlev, Voronezh State Univ. (Russian Federation)
A. Kostyuchenko, Voronezh State Univ. (Russian Federation)
M. Sumets, Voronezh State Architectural-Building Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 7747:
16th International School on Quantum Electronics: Laser Physics and Applications
Tanja Dreischuh; Dimitar Slavov, Editor(s)

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