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Proceedings Paper

Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Author(s): Thilo Sandner; Thomas Grasshoff; Harald Schenk; Andreas Kenda
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Paper Abstract

A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency.

Paper Details

Date Published: 14 February 2011
PDF: 9 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300I (14 February 2011); doi: 10.1117/12.879069
Show Author Affiliations
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Thomas Grasshoff, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
Andreas Kenda, Carinthian Tech Research AG (Austria)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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