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Proceedings Paper

An investigation into graphene exfoliation and potential graphene application in MEMS devices
Author(s): George Fercana; Gunther Kletetschka; Vilem Mikula; Mary Li
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Paper Abstract

The design of microelectromecanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) are often materials-limited with respect to the efficiency and capability of the material. Graphene, a one atom thick honeycomb lattice of carbon, is a highly desired material for MEMS applications. Relevant properties of graphene include the material's optical transparency, mechanical strength, energy efficiency, and electrical and thermal conductivity due to its electron mobility. Aforementioned properties make graphene a strong candidate to supplant existing transparent electrode technology and replace the conventionally used material, indium-tin oxide. In this paper we present preliminary results on work toward integration of graphene with MEMS structures. We are studying mechanical exfoliation of highly ordered pyrolytic graphite (HOPG) crystals by repeatedly applying and separating adhesive materials from the HOPG surface. The resulting graphene sheets are then transferred to silicon oxide substrate using the previously applied adhesive material. We explored different adhesive options, particularly the use of Kapton tape, to improve the yield of graphene isolation along with chemical cross-linking agents which operate on a mechanism of photoinsertion of disassociated nitrene groups. These perfluorophenyl nitrenes participate in C=C addition reactions with graphene monolayers creating a covalent binding between the substrate and graphene. We are focusing on maximizing the size of isolated graphene sheets and comparing to conventional exfoliation. Preliminary results allow isolation of few layer graphene (FLG) sheets (n<3) of approximately 10μm x 44μm. Photolithography could possibly be utilized to tailor designs for microshutter technology to be used in future deep space telescopes.

Paper Details

Date Published: 18 February 2011
PDF: 7 pages
Proc. SPIE 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X, 79280P (18 February 2011); doi: 10.1117/12.878965
Show Author Affiliations
George Fercana, Clemson Univ. (United States)
NASA Goddard Space Flight Ctr. (United States)
Gunther Kletetschka, Catholic Univ. of America (United States)
NASA Goddard Space Flight Ctr. (United States)
Geologic Institute (Czech Republic)
Vilem Mikula, Catholic Univ. of America (United States)
NASA Goddard Space Flight Ctr. (United States)
Mary Li, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 7928:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
Sonia Garcia-Blanco; Rajeshuni Ramesham, Editor(s)

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