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Proceedings Paper

Design and fabrication of a pre-aligned free-space optical interconnection device
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Paper Abstract

In this paper, we report the design and fabrication of a pre-aligned free-space optical interconnection (FSOI) device. A simple FSOI prototype device is designed based on Gaussian beam propagation calculation. All optical components of a FSOI device were designed in a single one mask, and the alignment between the optical components was achieved in the mask design stage. All optical components including microlens array and micro mirrors were positioned in an out-of-plane fashion. The fabrication was based on a tilted Ultraviolet (UV) lithography of the SU-8 mold and fast replication using a UV curable polymer. This method allows the production of integrated optical systems similar to conventional optical benches in microscale and eliminates the need for tedious high-precision assembly.

Paper Details

Date Published: 14 February 2011
PDF: 7 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300X (14 February 2011); doi: 10.1117/12.878470
Show Author Affiliations
Zhengyu Miao, Louisiana State Univ. (United States)
Guocheng Shao, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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