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Proceedings Paper

Agile and accurate control of lithographic imaging using a freeform illuminator
Author(s): Kazuya Fukuhara; Yusuke Hirose; Katsuyoshi Kodera; Nobuhiro Komine; Satomi Higashibata; Koike Takashi; Kazuyuki Masukawa; Kazutaka Ishigo; Tadahito Fujisawa; Satoshi Tanaka; Takuya Kono; Tetsuro Nakasugi
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Paper Details

Date Published:
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Proc. SPIE 7973, Optical Microlithography XXIV, 797307; doi: 10.1117/12.877935
Show Author Affiliations
Kazuya Fukuhara, Toshiba Materials Co., Ltd. (Japan)
Yusuke Hirose, Toshiba Materials Co., Ltd. (Japan)
Katsuyoshi Kodera, Toshiba Materials Co., Ltd. (Japan)
Nobuhiro Komine, Toshiba Materials Co., Ltd. (Japan)
Satomi Higashibata, Toshiba Corp. (Japan)
Koike Takashi, Toshiba Corp. (Japan)
Kazuyuki Masukawa, Toshiba Corp. (Japan)
Kazutaka Ishigo, Toshiba Materials Co., Ltd. (Japan)
Tadahito Fujisawa, Toshiba Materials Co., Ltd. (Japan)
Satoshi Tanaka, Toshiba Materials Co., Ltd. (Japan)
Takuya Kono, Toshiba Materials Co., Ltd. (Japan)
Tetsuro Nakasugi, Toshiba Materials Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 7973:
Optical Microlithography XXIV
Mircea V. Dusa, Editor(s)

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