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Proceedings Paper

Laser machining and plasma analysis using a novel trepanning system
Author(s): Gerd Illing; David Ashkenasi; Tristan Kaszemeikat; Norbert Müller; David Diego-Vallejo; Hans-Joachim Eichler
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Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200V; doi: 10.1117/12.876829
Show Author Affiliations
Gerd Illing, Laser- und Medizin-Technologie GmbH, Berlin (Germany)
David Ashkenasi, Laser- und Medizin-Technologie GmbH, Berlin (Germany)
Tristan Kaszemeikat, Laser- und Medizin-Technologie GmbH, Berlin (Germany)
Norbert Müller, Laser- und Medizin-Technologie GmbH, Berlin (Germany)
David Diego-Vallejo, Instituto Politécnico Nacional (Mexico)
Hans-Joachim Eichler, Technische Univ. Berlin (Germany)


Published in SPIE Proceedings Vol. 7920:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
Bo Gu; Guido Hennig; Xianfan Xu; Hiroyuki Niino, Editor(s)

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