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Proceedings Paper

New concept for in-line OLED manufacturing
Author(s): U. Hoffmann; H. Landgraf; M. Campo; S. Keller; M. Koening
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Paper Abstract

A new concept of a vertical In-Line deposition machine for large area white OLED production has been developed. The concept targets manufacturing on large substrates (≥ Gen 4, 750 x 920 mm2) using linear deposition source achieving a total material utilization of ≥ 50 % and tact time down to 80 seconds. The continuously improved linear evaporation sources for the organic material achieve thickness uniformity on Gen 4 substrate of better than ± 3 % and stable deposition rates down to less than 0.1 nm m/min and up to more than 100 nm m/min. For Lithium-Fluoride but also for other high evaporation temperature materials like Magnesium or Silver a linear source with uniformity better than ± 3 % has been developed. For Aluminum we integrated a vertical oriented point source using wire feed to achieve high (> 150 nm m/min) and stable deposition rates. The machine concept includes a new vertical vacuum handling and alignment system for Gen 4 shadow masks. A complete alignment cycle for the mask can be done in less than one minute achieving alignment accuracy in the range of several 10 μm.

Paper Details

Date Published: 9 February 2011
PDF: 8 pages
Proc. SPIE 7954, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XV, 79540Z (9 February 2011); doi: 10.1117/12.876623
Show Author Affiliations
U. Hoffmann, Applied Materials GmbH & Co. KG (Germany)
H. Landgraf, Applied Materials GmbH & Co. KG (Germany)
M. Campo, Applied Materials GmbH & Co. KG (Germany)
S. Keller, Applied Materials GmbH & Co. KG (Germany)
M. Koening, Applied Materials GmbH & Co. KG (Germany)


Published in SPIE Proceedings Vol. 7954:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XV
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Norbert Linder, Editor(s)

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