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Proceedings Paper

Directly induced ablation of metal thin films by ultrashort laser pulses
Author(s): Gerhard Heise; Jan Konrad; Sebastian Sarrach; Jürgen Sotrop; Heinz P. Huber
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Paper Abstract

Molybdenum films on a glass substrate are ablated from the glass side by picosecond laser pulses at fluences below 1 J/cm2, without damage. Thin films of chromium, titanium and platinum with thicknesses between 200 nm and 1 μm were examined to investigate the underlying ablation mechanisms. For molybdenum an influence of the intermediate buffer layer was observed. Ablation from the glass side clearly has higher ablation efficiency and a better structural quality in contrast to metal side patterning. A model will be presented, in which the ablation characteristics are connected with the mechanical ductility of the metal.

Paper Details

Date Published: 15 February 2011
PDF: 8 pages
Proc. SPIE 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI, 792511 (15 February 2011); doi: 10.1117/12.876451
Show Author Affiliations
Gerhard Heise, Munich Univ. of Applied Sciences (Germany)
Jan Konrad, Munich Univ. of Applied Sciences (Germany)
Sebastian Sarrach, Munich Univ. of Applied Sciences (Germany)
Jürgen Sotrop, Munich Univ. of Applied Sciences (Germany)
Heinz P. Huber, Munich Univ. of Applied Sciences (Germany)


Published in SPIE Proceedings Vol. 7925:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI
Alexander Heisterkamp; Joseph Neev; Stefan Nolte, Editor(s)

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