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Proceedings Paper

Low-power thermal tuning of SOI-CMOS photonic structures
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Paper Abstract

Ring waveguide resonating structures with high quality factors are the key components servicing silicon photonic links. We demonstrate highly efficient spectral tunability of the microphotonic ring structures manufactured in commercial 130 nm SOI CMOS technology. Our rings are fitted with dedicated heaters and integrated with silicon micro-machined features. Optimized layout and structure of the devices result in their maximized thermal impedance and increased efficiency of the thermal tuning.

Paper Details

Date Published: 17 January 2011
PDF: 11 pages
Proc. SPIE 7944, Optoelectronic Interconnects and Component Integration XI, 794402 (17 January 2011); doi: 10.1117/12.876428
Show Author Affiliations
Ivan Shubin, Oracle (United States)
Xuezhe Zheng, Oracle (United States)
Guoliang Li, Oracle (United States)
Hiren Thacker, Oracle (United States)
Jin Yao, Oracle (United States)
Bruce Guenin, Oracle (United States)
Thierry Pinguet, Luxtera (United States)
Attila Mekis, Luxtera (United States)
A. V. Krishnamoorthy, Oracle (United States)
J. E. Cunningham, Oracle (United States)


Published in SPIE Proceedings Vol. 7944:
Optoelectronic Interconnects and Component Integration XI
Alexei L. Glebov; Ray T. Chen, Editor(s)

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