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Proceedings Paper

Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems
Author(s): Mark N. Horenstein; Robert Sumner; Preston Miller; Thomas Bifano; Jason Stewart; Steven Cornelissen
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Paper Abstract

We present a new multiplexed high-voltage driver architecture that departs from previous MEMS deformable-mirror drivers. Just one D/A converter and one high-voltage amplifier module drive the entire actuator array through a row-column addressing scheme. This approach reduces operational power consumption of a multiple-channel deformable-mirror driver by two orders of magnitude. It can provide for the integration of the deformable mirror and driver into a compact package, reducing driver volume by an order of magnitude. Both of these system modifications are essential for the implementation of MEMS deformable mirrors into space-based adaptive optics systems and other applications.

Paper Details

Date Published: 14 February 2011
PDF: 8 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300M (14 February 2011); doi: 10.1117/12.876404
Show Author Affiliations
Mark N. Horenstein, Boston Univ. (United States)
Robert Sumner, Boston Univ. (United States)
Preston Miller, Boston Univ. (United States)
Thomas Bifano, Boston Micromachines Corp. (United States)
Jason Stewart, Boston Micromachines Corp. (United States)
Steven Cornelissen, Boston Micromachines Corp. (United States)


Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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