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Proceedings Paper

Fabrication of single-mode channel waveguides via microfluidics
Author(s): Sarfaraz Baig; Qunhui Sun; Michael R. Wang
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Paper Abstract

We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.

Paper Details

Date Published: 14 February 2011
PDF: 6 pages
Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270O (14 February 2011); doi: 10.1117/12.876331
Show Author Affiliations
Sarfaraz Baig, Univ. of Miami (United States)
Qunhui Sun, New Span Opto-Technology Inc. (United States)
Michael R. Wang, Univ. of Miami (United States)

Published in SPIE Proceedings Vol. 7927:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

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