Share Email Print

Proceedings Paper

Fabrication of single-mode channel waveguides via microfluidics
Author(s): Sarfaraz Baig; Qunhui Sun; Michael R. Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.

Paper Details

Date Published: 14 February 2011
PDF: 6 pages
Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270O (14 February 2011); doi: 10.1117/12.876331
Show Author Affiliations
Sarfaraz Baig, Univ. of Miami (United States)
Qunhui Sun, New Span Opto-Technology Inc. (United States)
Michael R. Wang, Univ. of Miami (United States)

Published in SPIE Proceedings Vol. 7927:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

© SPIE. Terms of Use
Back to Top