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Proceedings Paper

Effect of the oxide-semiconductor interface on the passivation of hybrid type-II superlattice long-wave infrared photodiodes
Author(s): Jill A. Nolde; Rory Stine; Eric M. Jackson; Chadwick L. Canedy; Igor Vurgaftman; Serguei I. Maximenko; Chaffra A. Affouda; Maria Gonzalez; Edward H. Aifer; Jerry R. Meyer
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Paper Abstract

In order to be commercially viable, the type-II superlattice (T2SL) LWIR focal plane array technology will require the development of effective passivation of exposed surfaces. Here we investigate the relationship between the thickness and composition of the native oxide at the T2SL-SiO2 interface and the diode performance in terms of sidewall resistivity. Device performance is compared between samples with untreated surfaces, those for which the native oxides have been removed at various intervals prior to SiO2 deposition, and samples for which oxide growth was promoted by ozone exposure with and without a prior oxide strip. InAs- and GaSb-capped pieces were processed in an identical manner and studied using X-ray photoelectron spectroscopy (XPS). From these spectra, the compositions and thicknesses of the surface oxides just prior to SiO2 deposition were determined, complementing the electrical characterization of devices. Correlation of the performance and surface composition is presented.

Paper Details

Date Published: 24 January 2011
PDF: 9 pages
Proc. SPIE 7945, Quantum Sensing and Nanophotonic Devices VIII, 79451Y (24 January 2011); doi: 10.1117/12.876320
Show Author Affiliations
Jill A. Nolde, Naval Research Lab. (United States)
Rory Stine, Nova Research, Inc. (United States)
Eric M. Jackson, Naval Research Lab. (United States)
Chadwick L. Canedy, Naval Research Lab. (United States)
Igor Vurgaftman, Naval Research Lab. (United States)
Serguei I. Maximenko, Global Defense Technology & Systems, Inc. (United States)
Chaffra A. Affouda, Naval Research Lab. (United States)
Maria Gonzalez, Global Defense Technology & Systems, Inc. (United States)
Edward H. Aifer, Naval Research Lab. (United States)
Jerry R. Meyer, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 7945:
Quantum Sensing and Nanophotonic Devices VIII
Manijeh Razeghi; Rengarajan Sudharsanan; Gail J. Brown, Editor(s)

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