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Proceedings Paper

MEMS product engineering: methodology and tools
Author(s): Dirk Ortloff; Jens Popp; Thilo Schmidt; Kai Hahn; Matthias Mielke; Rainer Brück
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Paper Abstract

The development of MEMS comprises the structural design as well as the definition of an appropriate manufacturing process. Technology constraints have a considerable impact on the device design and vice-versa. Product design and technology development are therefore concurrent tasks. Based on a comprehensive methodology the authors introduce a software environment that links commercial design tools from both area into a common design flow. In this paper emphasis is put on automatic low threshold data acquisition. The intention is to collect and categorize development data for further developments with minimum overhead and minimum disturbance of established business processes. As a first step software tools that automatically extract data from spreadsheets or file-systems and put them in context with existing information are presented. The developments are currently carried out in a European research project.

Paper Details

Date Published: 14 February 2011
PDF: 10 pages
Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 79260D (14 February 2011); doi: 10.1117/12.876104
Show Author Affiliations
Dirk Ortloff, Process Relations GmbH (Germany)
Jens Popp, Process Relations GmbH (Germany)
Thilo Schmidt, Univ. of Siegen (Germany)
Kai Hahn, Univ. of Siegen (Germany)
Matthias Mielke, Univ. of Siegen (Germany)
Rainer Brück, Univ. of Siegen (Germany)


Published in SPIE Proceedings Vol. 7926:
Micromachining and Microfabrication Process Technology XVI
Mary Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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