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Proceedings Paper

Spherical and non-spherical high fill-factor microlens arrays fabricated by polymer coating on isotropically etched quartz
Author(s): Minwoo Nam; Haekwan Oh; Geunyoung Kim; Hyunwoo Seo; Yotak Song; Sang Sik Yang; Kee-Keun Lee
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Paper Abstract

Various shapes of microlens arrays (MLAs) were developed by utilizing polymer coating on etched quartz substrates. Spherical and non-spherical plano-concave curvatures were realized via isotropic wet etching of quartz in buffered oxide etchant (BOE), based on diverse design parameters and calculated etching times. The fabricated curvatures showed a high fill-factor and uniform elements in the array. By coating a higher refractive index polymer on the etched quartz, the illuminated light was well focused at the focal plane forming a micronscale light spot array. The experimental focal length was increased from 39.8 to 49.6 μm, as the shape of microlens was flattened. These results well correspond to those obtained from an optical simulation.

Paper Details

Date Published: 28 February 2011
PDF: 6 pages
Proc. SPIE 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X, 792804 (28 February 2011); doi: 10.1117/12.876092
Show Author Affiliations
Minwoo Nam, Ajou Univ. (Korea, Republic of)
Haekwan Oh, Ajou Univ. (Korea, Republic of)
Geunyoung Kim, Ajou Univ. (Korea, Republic of)
Hyunwoo Seo, Opto FineTech Inc. (Korea, Republic of)
Yotak Song, Opto FineTech Inc. (Korea, Republic of)
Sang Sik Yang, Ajou Univ. (Korea, Republic of)
Kee-Keun Lee, Ajou Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 7928:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
Sonia Garcia-Blanco; Rajeshuni Ramesham, Editor(s)

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