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Proceedings Paper

Novel solutions for thin film layer deposition for organic materials
Author(s): Dietmar Keiper; Michael Long; Markus Schwambera; Markus Gersdorff; Juergen Kreis; Michael Heuken
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Paper Abstract

Innovative systems for carrier-gas enhanced vapor phase deposition of organic layers offer advanced methods for the precise deposition of complex thin-film layer stacks. The approach inherently avoids potential short-comings from solvent-based polymer deposition and offers new opportunities. The process operates at low pressure (thus avoiding complex vacuum setups), and, by employing AIXTRON's extensive experience in freely scalable solutions, can be adapted to virtually any production process and allows for R&D and production systems alike. Deposition of organic layers and stacks recommends the approach for a wide range of organic small molecule and polymer materials (including layers with gradual change of the composition), for conductive layers, for dielectric layers, for barrier systems, for OLED materials, and surface treatments such as oleophobic / hydrophobic coatings. With the combination of other vapor phase deposition solutions, hybrid systems combining organic and inorganic materials and other advanced stacks can be realized.

Paper Details

Date Published: 3 February 2011
PDF: 12 pages
Proc. SPIE 7956, Advances in Display Technologies; and E-papers and Flexible Displays, 79560I (3 February 2011); doi: 10.1117/12.876071
Show Author Affiliations
Dietmar Keiper, AIXTRON SE (Germany)
Michael Long, AIXTRON SE (Germany)
Markus Schwambera, AIXTRON SE (Germany)
Markus Gersdorff, AIXTRON SE (Germany)
Juergen Kreis, AIXTRON SE (Germany)
Michael Heuken, AIXTRON SE (Germany)

Published in SPIE Proceedings Vol. 7956:
Advances in Display Technologies; and E-papers and Flexible Displays
Karlheinz Blankenbach; Liang-Chy Chien; Sin-Doo Lee; Ming Hsien Wu, Editor(s)

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