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Proceedings Paper

Micro-cavities based on width modulated SOI waveguides
Author(s): Stefan Meister; Aws Al-Saadi; Bülent A. Franke; Shaimaa Mahdi; Miroslaw Szczambura; Berndt Kuhlow; Ulrike Woggon; Lars Zimmermann; Harald H. Richter; David Stolarek; Sigurd K. Schrader; Hans J. Eichler
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Paper Abstract

We have designed, fabricated and investigated one-dimensional (1D) micro-cavities in Silicon-on-Insulator (SOI) waveguides. The single mode waveguides are fabricated in a 220 nm silicon device layer. The 1D micro-cavities in Fabry-Perot structure consist of two Bragg-mirror regions formed by a sinusoidal modulation of the waveguide width. The mirror regions are separated by a sub-micron spacer. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. The transmission spectra of these width modulated micro-cavities with different mirror reflectivities and cavity lengths are investigated. Q-factors up to 855 could be observed at 1550 nm wavelength with low insertion loss of 1.9 dB. The width modulated micro-cavities, including the mirror regions, have lengths of less than 20 microns and widths of maximum 450 nm. These small foot-print cavities act as band pass filters and can be used as resonators for laser or electro-optic modulation of light.

Paper Details

Date Published: 17 January 2011
PDF: 6 pages
Proc. SPIE 7943, Silicon Photonics VI, 79430T (17 January 2011); doi: 10.1117/12.875652
Show Author Affiliations
Stefan Meister, Technische Univ. Berlin (Germany)
Aws Al-Saadi, Technische Univ. Berlin (Germany)
Bülent A. Franke, Technische Univ. Berlin (Germany)
Shaimaa Mahdi, Technische Univ. Berlin (Germany)
Miroslaw Szczambura, Technische Univ. Berlin (Germany)
Berndt Kuhlow, Technische Univ. Berlin (Germany)
Ulrike Woggon, Technische Univ. Berlin (Germany)
Lars Zimmermann, IHP GmbH (Germany)
Harald H. Richter, IHP GmbH (Germany)
David Stolarek, IHP GmbH (Germany)
Sigurd K. Schrader, Technische Fachhochschule Wildau (Germany)
Hans J. Eichler, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 7943:
Silicon Photonics VI
Joel A. Kubby; Graham T. Reed, Editor(s)

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