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Proceedings Paper

Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Author(s): Marco Meinig; Steffen Kurth; Karla Hiller; Norbert Neumann; Martin Ebermann; Elvira Gittler; Thomas Gessner
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Paper Abstract

A tunable IR filter based on a Fabry-Perot interferometer with two movable reflectors is reported. The infrared filter can be tuned over a wavelength range from 8 μm to 11 μm with voltages lower than 63 V. The FWHM bandwidth is lower than 200 nm and the peak transmittance is larger than 70 %. Simulation and practical shock test, both showed that the device can withstand 1500 g, 0.5 ms shocks according to Mil-Std-883G, method 2002.4, test condition B. The new infrared filter measures 8.5 mm x 8.5 mm and is suitable for the integration in a TO-8 housing in combination with a broadband infrared detector. The design benefits from relatively low stiffness of the mirror suspensions, compensation of vibration and gravitation induced forces possibly influencing the central wavelength and much lower actuation voltages as a result. Both reflector carriers are movable and are actuated by electrostatic forces.

Paper Details

Date Published: 14 February 2011
PDF: 12 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300K (14 February 2011); doi: 10.1117/12.875428
Show Author Affiliations
Marco Meinig, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Steffen Kurth, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Karla Hiller, Chemnitz Univ. of Technology (Germany)
Norbert Neumann, InfraTec GmbH (Germany)
Martin Ebermann, InfraTec GmbH (Germany)
Elvira Gittler, JENOPTIK Optical Systems GmbH (Germany)
Thomas Gessner, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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