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Proceedings Paper

High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams
Author(s): F. Courvoisier; M. K. Bhuyan; M. Jacquot; P. A. Lacourt; R. Salut; L. Furfaro; John M. Dudley
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Paper Abstract

Ultrafast laser pulses are a powerful tool to process dielectrics. Here, we review our recent work concerning high aspect ratio micro and nanochannel processing in glass. We show how femtosecond Bessel beams overcome many of the difficulties associated with Gaussian beams. We report on single shot processing of nanochannels with aspect ratio up to 100. Underlying physical phenomena are discussed.

Paper Details

Date Published: 21 February 2011
PDF: 8 pages
Proc. SPIE 7921, Laser-based Micro- and Nanopackaging and Assembly V, 79210K (21 February 2011); doi: 10.1117/12.875409
Show Author Affiliations
F. Courvoisier, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
M. K. Bhuyan, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
M. Jacquot, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
P. A. Lacourt, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
R. Salut, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
L. Furfaro, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)
John M. Dudley, FEMTO-ST Institute, CNRS, Univ. de Franche-Comté (France)


Published in SPIE Proceedings Vol. 7921:
Laser-based Micro- and Nanopackaging and Assembly V
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio, Editor(s)

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