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Proceedings Paper

Pixel isolation of low dark-current large-format InAs/GaSb superlattice complementary barrier infrared detector focal plane arrays with high fill factor
Author(s): Jean Nguyen; Cory J. Hill; Don Rafol; Sam Keo; Alexander Soibel; David Z.-Y. Ting; Jason Mumolo; John Liu; Sarath D. Gunapala
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Paper Abstract

Low dark current and high fill factor are two crucial characteristics for the realization of the InAs/GaSb superlattice (SL) technology as third generation focal plane arrays (FPAs). Recent development proved high performance results for the complementary barrier infrared detector (CBIRD) design, and a high-quality etch technique is required to minimize surface leakage currents. We report on a n-CBIRD with 10.3 μm cutoff, exhibiting a responsivity of 1.7 A/W and dark current density of 1×10-5 A/cm2 at 77K under 0.2 V bias, without AR coating and without passivation. Results from four different mesa isolation techniques are compared on single element diodes: chemical wet etch using C4H6O6:H3PO4:H2O2:H2O, BCl3/Ar inductively coupled plasma (ICP), CH4/H2/Ar ICP, and CH4/H2/BCl3/Cl2/Ar ICP. The CH4/H2/BCl3/Cl2/Ar etched structures yielded more than 2.5 times improvement in dark current density and nearvertical sidewalls. Using this etching technique, we then implement a 1k x 1k p-CBIRD array with 11.5 μm cutoff and peak responsivity of 3 A/W. Operating at T = 80K, the array yielded a 81% fill factor with 98% operability and performance results of 21% quantum efficiency, 53 mK NE▵T, and NEI of 6.9×1013 photons/sec-cm2.

Paper Details

Date Published: 24 January 2011
PDF: 6 pages
Proc. SPIE 7945, Quantum Sensing and Nanophotonic Devices VIII, 79451T (24 January 2011); doi: 10.1117/12.875354
Show Author Affiliations
Jean Nguyen, Jet Propulsion Lab. (United States)
Cory J. Hill, Jet Propulsion Lab. (United States)
Don Rafol, Jet Propulsion Lab. (United States)
Sam Keo, Jet Propulsion Lab. (United States)
Alexander Soibel, Jet Propulsion Lab. (United States)
David Z.-Y. Ting, Jet Propulsion Lab. (United States)
Jason Mumolo, Jet Propulsion Lab. (United States)
John Liu, Jet Propulsion Lab. (United States)
Sarath D. Gunapala, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 7945:
Quantum Sensing and Nanophotonic Devices VIII
Manijeh Razeghi; Rengarajan Sudharsanan; Gail J. Brown, Editor(s)

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