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Proceedings Paper

Linear polarization modulation heterodyne ellipsometer using digital signal processing technique
Author(s): Chih-Jen Yu; Chien Chou
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Paper Abstract

In this research, a novel linear polarization modulation heterodyne ellipsometer (LPMHE) integrated with a digital signal processor is able to measure ellipsometric parameters of a specimen was developed. In this setup, a pair of orthogonally circularly polarized lights with slightly different frequency of the laser beam is used which behaves like a linear polarization rotator at high speed. By integrating with a digital storage oscilloscope, LPMHE is able to real-time measure ellipsometric parameters precisely. When the incident angles of laser beam are set at 60° and 70° in LPMHE, an accuracy of less than 0.7% on ellipsometric parameters measurement of the SiO2 thin film deposited on silicon substrate was demonstrated.

Paper Details

Date Published: 23 February 2011
PDF: 6 pages
Proc. SPIE 7934, Optical Components and Materials VIII, 79341G (23 February 2011); doi: 10.1117/12.875103
Show Author Affiliations
Chih-Jen Yu, Chang Gung Univ. (Taiwan)
Chien Chou, Chang Gung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7934:
Optical Components and Materials VIII
Michel J. F. Digonnet; Shibin Jiang; John W. Glesener; J. Christopher Dries, Editor(s)

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