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Proceedings Paper

Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies
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Paper Abstract

Diamond-micro milling and ultra-precision free-form turning technologies for fabricating micro lens arrays (MLA) with a large number of lenslets are explained in detail and compared. Besides the programming of the toolpath, correction loops and cutting parameters are presented. Both technologies are compared regarding achievable form deviation, roughness and economic factors like machining time. The paper offers a guideline for ultra-precision machining of micro lens array master molds on planar substrates and curved surfaces.

Paper Details

Date Published: 14 February 2011
PDF: 11 pages
Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270N (14 February 2011); doi: 10.1117/12.874751
Show Author Affiliations
Sebastian Scheiding, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Allen Y. Yi, The Ohio State Univ. (United States)
Andreas Gebhardt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Roman Loose, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Lei Li, The Ohio State Univ. (United States)
Stefan Risse, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Ramona Eberhardt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 7927:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

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