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Proceedings Paper

MEMS-based laser scanning microscope for endoscopic use
Author(s): U. Schelinski; J. Knobbe; H.-G. Dallmann; H. Grüger; M. Förster; M. Scholles; M. Schwarzenberg; R. Rieske
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Paper Abstract

A miniaturized MEMS scanning microscope is presented, which enables endoscopic imaging for medical, biological and technical purposes. It consists of an optical head of only 8 mm diameter that is coupled via optical fibers and wires to a distant unit containing optics and electronics for microscope control and data processing. A PC or notebook is completing the system, acting as user interface, image display and storage. The microscope uses a focused flying laser spot allowing a resolution of about 15 μm within the focus plane. This enables new endoscopic applications as in-vivo investigation of cancer-suspicious tissues in medicine.

Paper Details

Date Published: 11 February 2011
PDF: 10 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793004 (11 February 2011); doi: 10.1117/12.874625
Show Author Affiliations
U. Schelinski, Fraunhofer Institute for Photonic Microsystems (Germany)
J. Knobbe, Fraunhofer Institute for Photonic Microsystems (Germany)
H.-G. Dallmann, Fraunhofer Institute for Photonic Microsystems (Germany)
H. Grüger, Fraunhofer Institute for Photonic Microsystems (Germany)
M. Förster, Fraunhofer Institute for Photonic Microsystems (Germany)
M. Scholles, Fraunhofer Institute for Photonic Microsystems (Germany)
M. Schwarzenberg, Fraunhofer Institute for Photonic Microsystems (Germany)
R. Rieske, Dresden Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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