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Proceedings Paper

Nb5N6 bolometer operated at room temperature for detecting at 100 GHz
Author(s): L. Kang; X. H. Lu; J. Chen; C. H. Cao; W. W. Xu; B. B. Jin; P. H. Wu; Q. J. Yao; S. C. Shi
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Paper Abstract

Onto a double layer, which is made of a Si substrate ( ρ> 1000 Ω·cm ) and a SiO2 layer 100 nm thick on top of it, a Nb5N6 thin film microbridge is deposited and integrated with an aluminum bow-tie planar antenna. With a SiO2 air-bridge further fabricated underneath the microbridge and operated at room temperature, such a combination behaves very well as a bolometer for detecting signals at 100 GHz, thanks to a temperature coefficient of resistance (TCR) as high as -0.7% K-1 of the Nb5N6 thin film. According to our estimations, the best attainable electrical responsivity of the bolometer is about -400 V/W at a current bias of 0.4 mA. The electrical noise equivalent power (NEP) is 6.9x10-11 W/Hz1/2 for a modulation frequency at 300 Hz and 9.8x10-12 W/Hz1/2 for a modulation frequency above 10 kHz respectively, which are better than those of commercial products (such as Golay cell and Schottky diode detectors). A quasi-optical receiver based on such a bolometer is constructed and measured.

Paper Details

Date Published: 24 February 2011
PDF: 6 pages
Proc. SPIE 7938, Terahertz Technology and Applications IV, 79380F (24 February 2011); doi: 10.1117/12.874578
Show Author Affiliations
L. Kang, Nanjing Univ. (China)
X. H. Lu, Nanjing Univ. (China)
J. Chen, Nanjing Univ. (China)
C. H. Cao, Nanjing Univ. (China)
W. W. Xu, Nanjing Univ. (China)
B. B. Jin, Nanjing Univ. (China)
P. H. Wu, Nanjing Univ. (China)
Q. J. Yao, The Purple Mountain Observatory (China)
S. C. Shi, The Purple Mountain Observatory (China)


Published in SPIE Proceedings Vol. 7938:
Terahertz Technology and Applications IV
Laurence P. Sadwick; Créidhe M. M. O'Sullivan, Editor(s)

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