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Proceedings Paper

Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film
Author(s): T. Hiromoto; K. Momoo; Y. Nakata; N. Miyanaga
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Paper Abstract

Interfering ultra-short pulse laser processing can make nano-structures on metallic thin films. The unit nano-structures are nano-waterdrop, nanocrown, nanobump etc.. They change according to the character of target and the interference pattern. An interference pattern of four beams, diffracted by a transmission grating, is like a simple matrix. We generated arranged periodic structures different from the past experiments, by changing the configuration of four interfering beams. Parameters of an interference pattern are wavelength, correlation angle, difference of intensities and phase shift between the beams. As a result, complicated or duplicated structures can be generated.

Paper Details

Date Published: 21 February 2011
PDF: 7 pages
Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 792013 (21 February 2011); doi: 10.1117/12.874407
Show Author Affiliations
T. Hiromoto, Osaka Univ. (Japan)
K. Momoo, Osaka Univ. (Japan)
Y. Nakata, Osaka Univ. (Japan)
N. Miyanaga, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 7920:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
Bo Gu; Guido Hennig; Xianfan Xu; Hiroyuki Niino, Editor(s)

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