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Proceedings Paper

Vacuum ultraviolet light generation at 193 nm by quasi-phase-matched quartz
Author(s): Masaki Harada; Muneyuki Adachi; Ken-ichi Muramatsu; Motoi Ueda; Tsuyoshi Yamada; Sunao Kurimura
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Paper Abstract

Coherent all-solid-state light source of a wavelength below 200nm is attracting a lot of attention for industrial applications such as semiconductor processing, eye surgery, and micro machining. Multi-stage wavelength conversion from a high power infrared solid-state laser is a promising solution. We have developed a technology for quasi-phasematching (QPM) in crystalline quartz that utilizes stress-induced twinning. In the present paper, we report a novel stressmaintaining module that suppresses back-switching of twinning and enables QPM-SHG in the vacuum ultraviolet (VUV) region. We demonstrated the fabrication of finest periodic twins with a period of 9.6 μm and performed QPM-SHG experiment. Vacuum ultraviolet 193.4 nm light of 17 mW was generated from 177 mW fundamental light. To the best of our knowledge, this is the shortest emission wavelength ever obtained with QPM technology.

Paper Details

Date Published: 22 February 2011
PDF: 6 pages
Proc. SPIE 7917, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications X, 791709 (22 February 2011); doi: 10.1117/12.874130
Show Author Affiliations
Masaki Harada, National Institute for Materials Science (Japan)
Nikon Corp. (Japan)
Muneyuki Adachi, National Institute for Materials Science (Japan)
Nidek Co., Ltd. (Japan)
Ken-ichi Muramatsu, Nikon Corp. (Japan)
Motoi Ueda, Nikon Corp. (Japan)
Tsuyoshi Yamada, Nidek Co., Ltd. (Japan)
Sunao Kurimura, National Institute for Materials Science (Japan)


Published in SPIE Proceedings Vol. 7917:
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications X
Konstantin L. Vodopyanov, Editor(s)

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