Share Email Print

Proceedings Paper

Silicon-on-insulator nanopillar-array optical sensor
Author(s): Tao Xu; Michelle Xu; Ning Zhu; Priyadarshini Kumari; Lech Wosinski; Stewart Aitchison; Harry Ruda
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Pillar-array based optical cavities have unique properties, e.g., having a large and connected low dielectric index space (normally air space), having a large percent of electric field energy in air and standing on a substrate. These properties make them well suitable to make ultra compact and highly sensitive label-free optical sensors to detect bio-/chemical reactions. We designed, fabricated, and measured a silicon-on-insulator pillar array microcavity that possesses a quality factor as high as 27,600. We studied its sensitivity for both bulk index change and surface index modification. As a bulk index sensor, for environmental refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. As a surface index sensor, the simulations show, for a coating with thickness of 1 nm, the resonance wavelength shifts as large as 2.86 nm. Combining with a sharp 0.06 nm wide resonance peak, our pillar-array sensor is able to resolve ultra small bulk and surface refractive index changes caused by target molecules.

Paper Details

Date Published: 11 February 2011
PDF: 6 pages
Proc. SPIE 7908, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII, 79080O (11 February 2011); doi: 10.1117/12.874099
Show Author Affiliations
Tao Xu, Canadian Solar Inc. (China)
Michelle Xu, Univ. of Toronto (Canada)
Ning Zhu, Royal Institute of Technology (Sweden)
Zhejiang Univ. (China)
Priyadarshini Kumari, Univ. of Toronto (Canada)
Lech Wosinski, Royal Institute of Technology (Sweden)
Zhejiang Univ. (China)
Stewart Aitchison, Univ. of Toronto (Canada)
Harry Ruda, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 7908:
Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII
Alexander N. Cartwright; Dan V. Nicolau, Editor(s)

© SPIE. Terms of Use
Back to Top