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Proceedings Paper

Hybrid Si-LiNbO3 micro-ring resonators for active microphotonic devices
Author(s): Yoo Seung Lee; Gun-Duk Kim; Sang-Shin Lee; Wan-Gyu Lee; William H. Steier
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Paper Abstract

A hybrid structure of Si-LiNbO3 micro-ring resonator was fabricated. Free standing single crystal LiNbO3 microplatelets (mm long and 1 um thick) were obtained from a bulk LiNbO3 wafer by ion implantation and thermal shock. They were then transferred, positioned and bonded to Si micro-ring structure. In this hybrid structure, a large portion of the TM field is located above and below the Si waveguide. Then, the effective index of the Si waveguide can be changed by varying the refractive index of the LiNbO3 cladding layer. Theoretical calculation with finite difference method proved that the ratio between effective index change of the Si waveguide and index change of LiNbO3 cladding layer was 0.31 (ΔnSinLNO=0.31) for TM mode. Then, calculated ΔnSi was about 1×10-4 with 3 V. The effective r coefficient of Si and tuning sensitivity were about 7.2 pm/V and 2.55 GHz/V, respectively. These values are comparable to current active Si photonics with plasma dispersion methods. In addition, high speed modulation (over 40 GHz) is possible in this hybrid structure. This demonstration of a single crystalline LiNbO3 acting as the upper cladding shows the possibility of integrating a very good EO and NLO material into the silicon-on-insulator photonics technology.

Paper Details

Date Published: 23 February 2011
PDF: 7 pages
Proc. SPIE 7934, Optical Components and Materials VIII, 79340I (23 February 2011); doi: 10.1117/12.873956
Show Author Affiliations
Yoo Seung Lee, The Univ. of Southern California (United States)
Gun-Duk Kim, Kwangwoon Univ. (Korea, Republic of)
Sang-Shin Lee, The Univ. of Southern California (United States)
Kwangwoon Univ. (Korea, Republic of)
Wan-Gyu Lee, KAIST (Korea, Republic of)
William H. Steier, The Univ. of Southern California (United States)

Published in SPIE Proceedings Vol. 7934:
Optical Components and Materials VIII
Michel J. F. Digonnet; Shibin Jiang; John W. Glesener; J. Christopher Dries, Editor(s)

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