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On the shrinkage characteristics of a UV-curable hybrid polymer (Ormocomp®) used in microfabrication
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Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, ; doi: 10.1117/12.873508
Show Author Affiliations
Charalampos Schizas, Univ. of Piraeus (Greece)
Dimitris Karalekas, Univ. of Piraeus (Greece)


Published in SPIE Proceedings Vol. 7926:
Micromachining and Microfabrication Process Technology XVI
Mary Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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