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Proceedings Paper

Endurance analysis of optical master stamps for UV-replication
Author(s): F. C. Wippermann; A. Reimann; G. Leibeling
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Paper Abstract

The fabrication of optical components based on UV-replication is spreading rapidly in the field of high volume and low cost production. Hereby, a master stamp providing optical surface quality is imprinted into a liquid polymer material which can be cured under UV-exposure. Most prominent is the fabrication of miniaturized camera objectives for mobile phone applications done on wafer level. The required lens surfaces possess high sag and aspherical shape which leads to a challenging fabrication of the master stamp which consists of an array of identical convex or concave optical surfaces. We analyze the endurance of the stamp used in a step & repeat process for the fabrication of array-like structures used as master molds for UV-replication.

Paper Details

Date Published: 11 February 2011
PDF: 7 pages
Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 792603 (11 February 2011); doi: 10.1117/12.873506
Show Author Affiliations
F. C. Wippermann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
A. Reimann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
G. Leibeling, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 7926:
Micromachining and Microfabrication Process Technology XVI
Mary Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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